New PDF release: 35.Microelectromechanical Systems

By John G. Webster (Editor)

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34. Fluid Mechanics, L. Landau, E. Liftshitz, Pergammon Press, 1959. 35. W. Newell, Miniaturisation of tuning forks, Science, Vol. 161: pp. 1320–1326, 1968. 36. A. P. Wenger, Vibrating fluid densimeters: a solution to the viscosity problem, IEEE Trans on Industrial Electronics and Control Instrumentation, IECI-27 (3): pp. 247–253, 1980. 37. M. Christen, Air and gas damping of quartz tuning forks, Sensors and Actuators A, 4: pp. 555–564, 1983. 38. R. Johnson and A. Barr, Acoustic and internal damping in uniform beams, J.

Abdelmoneum, M. U. Demirci and C. -C. Nguyen, Stemless wine-glass-mode disk micromechanical resonators, Proc. Sixteenth IEEE Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Japan: pp. 698–701, 1923rd January 2003. 54. J. Wang, J. E. Butler, T. Feygelson and C. -C. 51-GHz nanocrystalline diamond micromechanical disk resonator with material-mismatched isolating support, Proc. Seventeenth IEEE Annual International Conference on Micro Electro Mechanical Systems, Maastrict, Netherlands: pp.

39. M. Andrews, I. Harris, G. Turner, A comparison of squeeze-film theory with measurements on a microstructure, Sensors and Actuators A, Vol. 26: pp. 79–87, 1993. 40. H. Hosaka, K. Itao and S. Kuroda, Damping characteristics of beam shaped micro-oscillators, Sensors and Actuators A, 49: pp. 87–95, 1995. 41. M. Andrews, I. Harris and G. Turner, A comparison of squeeze film theory damping with measuremnts on a microstructure, Sensors and Actuators A, 36: pp. 79–87, 1993. 42. J. G. Eisley, Nonlinear vibration of beams and rectangular plates, J.

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35.Microelectromechanical Systems by John G. Webster (Editor)


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